Design of hybrid sol–gel films for direct x-ray and electron beam nanopatterning

Published 2008 View Full Article

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Title
Design of hybrid sol–gel films for direct x-ray and electron beam nanopatterning
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 17, Pages 175306
Publisher
IOP Publishing
Online
2008-03-27
DOI
10.1088/0957-4484/19/17/175306

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