Chemorheology of Sol−Gel Silica for the Patterning of High Aspect Ratio Structures by Nanoimprint

Published 2010 View Full Article

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Title
Chemorheology of Sol−Gel Silica for the Patterning of High Aspect Ratio Structures by Nanoimprint
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 22, Issue 10, Pages 3143-3151
Publisher
American Chemical Society (ACS)
Online
2010-04-26
DOI
10.1021/cm100285b

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