Nanoimprint Lithography on Silica Sol-Gels: A Simple Route to Sequential Patterning

Title
Nanoimprint Lithography on Silica Sol-Gels: A Simple Route to Sequential Patterning
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 21, Issue 5, Pages 555-558
Publisher
Wiley
Online
2008-11-14
DOI
10.1002/adma.200702484

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