Quantification of porosity and deposition rate of nanoporous films grown by oblique-angle deposition

Published 2008 View Full Article

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Title
Quantification of porosity and deposition rate of nanoporous films grown by oblique-angle deposition
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 10, Pages 101914
Publisher
AIP Publishing
Online
2008-09-13
DOI
10.1063/1.2981690
References
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