Optical characterization of anatase TiO2 films patterned by direct ultraviolet-assisted nanoimprint lithography

Published 2010 View Full Article

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Title
Optical characterization of anatase TiO2 films patterned by direct ultraviolet-assisted nanoimprint lithography
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 6, Pages 923-928
Publisher
Elsevier BV
Online
2010-12-15
DOI
10.1016/j.mee.2010.12.018

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