Direct nanoimprinting of metal oxides by in situ thermal co-polymerization of their methacrylates

Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials

(2010) Mihaela Nedelcu et al.   ADVANCED FUNCTIONAL MATERIALS

Photo-induced hybrid nanopatterning of titanium dioxide via direct imprint lithography

(2010) Hyeong-Ho Park et al.   JOURNAL OF MATERIALS CHEMISTRY

Direct imprinting of high resolution TiO2nanostructures

(2010) Su Hui Lim et al.   NANOTECHNOLOGY

Nanopatterning Soluble Multifunctional Materials by Unconventional Wet Lithography

(2009) Massimiliano Cavallini et al.   ADVANCED MATERIALS

Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication

(2009) Elizabeth A. Costner et al.   Annual Review of Materials Research

Direct indium tin oxide patterning using thermal nanoimprint lithography for highly efficient optoelectronic devices

(2009) Ki-Yeon Yang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

UV irradiation effect on sol-gel indium tin oxide nanopatterns replicated by room-temperature nanoimprint

(2009) Yuji Kang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Formation of TiO[sub 2] nanopattern using reverse imprinting and sol-gel method

(2009) Kyung-min Yoon et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing

(2009) Ki-Yeon Yang et al.   MICROELECTRONIC ENGINEERING

Direct surface structuring of organometallic resists using nanoimprint lithography

(2009) Canet Acikgoz et al.   NANOTECHNOLOGY

The Patterning of Sub-500 nm Inorganic Oxide Structures

(2008) Meredith J. Hampton et al.   ADVANCED MATERIALS

Sub-100 nm Nanolithography and Pattern Transfer on Compound Semiconductor Using Sol-Gel-Derived TiO[sub 2] Resist

(2008) Boyang Liu et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Comparison of monomer and polymer resists in thermal nanoimprint lithography

(2008) M. Zelsmann et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Nanoimprint lithography: An old story in modern times? A review

(2008) Helmut Schift   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Nanolithography using spin-coatable ZrO2 resist and its application to sub-10 nm direct pattern transfer on compound semiconductors

(2008) Boyang Liu et al.   NANOTECHNOLOGY