Article
Chemistry, Multidisciplinary
Qing Liu, Jing Zhao, Jinlong Guo, Ruqun Wu, Wenjing Liu, Yiqin Chen, Guanghua Du, Huigao Duan
Summary: This study demonstrates a process for single-digit nanometer lithography using single heavy ions, achieving ultrahigh-aspect-ratio nanofilaments with sub-5 nm feature size. Control experiments and simulation analysis indicate that both the HSQ resist and heavy ions contribute to the high-resolution capabilities for sub-5 nm fabrication. The development of heavy-ion technology is expected to further enhance patterning resolution at the single-digit nanometer scale.
Review
Engineering, Manufacturing
Yiqin Chen, Zhiwen Shu, Shi Zhang, Pei Zeng, Huikang Liang, Mengjie Zheng, Huigao Duan
Summary: This review provides a systematic summary of sub-10 nm fabrication methods and their applications in emerging fields such as nano-optics, biosensing, and quantum devices. The methods are classified into three main approaches and their applications in quantum devices, nano-optics, and high-performance sensing are discussed. Challenges and opportunities associated with this research topic are also highlighted.
INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING
(2021)
Article
Multidisciplinary Sciences
Diego Turenne, Alexander Yaroslavtsev, Xiaocui Wang, Vivek Unikandanuni, Igor Vaskivskyi, Michael Schneider, Emmanuelle Jal, Robert Carley, Guiseppe Mercurio, Rafael Gort, Naman Agarwal, Benjamin Van Kuiken, Laurent Mercadier, Justine Schlappa, Loic Le Guyader, Natalia Gerasimova, Martin Teichmann, David Lomidze, Andrea Castoldi, Dimitri Potorochin, Deepak Mukkattukavil, Jeffrey Brock, Nanna Zhou Hagstrom, Alexander H. Reid, Xiaozhe Shen, Xijie J. Wang, Pablo Maldonado, Yaroslav Kvashnin, Karel Carva, Jian Wang, Yukiko K. Takahashi, Eric E. Fullerton, Stefan Eisebitt, Peter M. Oppeneer, Serguei Molodtsov, Andreas Scherz, Stefano Bonetti, Ezio Iacocca, Hermann A. Durr
Summary: Magnetic nanoparticles, such as FePt in the L1(0) phase, are crucial for current data storage technology. By studying the existence of spin-wave solitons in FePt nanoparticles, potential platforms for developing novel miniature devices can be explored.
Article
Chemistry, Multidisciplinary
Vincent De Andrade, Viktor Nikitin, Michael Wojcik, Alex Deriy, Sunil Bean, Deming Shu, Tim Mooney, Kevin Peterson, Prabhat Kc, Kenan Li, Sajid Ali, Kamel Fezzaa, Doga Gursoy, Cassandra Arico, Saliha Ouendi, David Troadec, Patrice Simon, Francesco De Carlo, Christophe Lethien
Summary: In recent years, transmission X-ray microscopes have become excellent tools for non-invasive characterization of nanoscale materials, but their spatial resolution has lagged behind modern nanostructures. Recent optomechanical breakthroughs have enabled fast 3D tomographic acquisitions with sub-10 nm resolution, narrowing the gap between X-ray and electron microscopy.
ADVANCED MATERIALS
(2021)
Article
Materials Science, Multidisciplinary
Kuei-Wen Huang, Sheng-Han Yi, Yu-Sen Jiang, Wei-Chung Kao, Yu-Tung Yin, David Beck, Vladimir Korolkov, Roger Proksch, Jay Shieh, Miin-Jang Chen
Summary: The study reports a similar to 6.5 nm pure ZrO2 thin film with a giant ferroelectric remanent polarization and effective piezoelectric coefficient on a Pt electrode, demonstrating excellent crystal orientation, which has potential implications for research and applications in nanoscale ferroelectric thin films.
Article
Nanoscience & Nanotechnology
Nikolaos Farmakidis, Jacob L. Swett, Nathan Youngblood, Xuan Li, Charalambos Evangeli, Samarth Aggarwal, Jan A. Mol, Harish Bhaskaran
Summary: Nanocalligraphy scanning probe lithography (nc-SPL) overcomes the limitations of conventional scanning probe lithography by achieving real-time adjustment of structures at the micron to nanometer scales, improving throughput, tip longevity, and reliability, and can be applied in both positive and negative tone patterning modes.
MICROSYSTEMS & NANOENGINEERING
(2021)
Article
Nanoscience & Nanotechnology
Santu Nandi, Lalit Khillare, Sunil Kumar, Mohamad G. Moinuddin, Manvendra Chauhan, Sumit Choudhary, Satinder K. Sharma, Subrata Ghosh, Kenneth E. Gonsalves
Summary: This work demonstrates the lithography application of an organotin-based cyclotrimeric species as a molecular resist for sub-10 nm patterning. The resist has been successfully used for patterning line/space features and discrete line features at a dose of 2.5 mC/cm2 using electron beam lithography, and line/space features at a dose of 16 mu C/cm2 using helium ion beam lithography. The resist also shows promising potential for patterning complex features at the single nanometer regime and has good etch resistance with respect to silicon.
ACS APPLIED NANO MATERIALS
(2023)
Article
Chemistry, Multidisciplinary
Hohyung Kang, Heeeun Joo, Junghoon Choi, Yong-Jae Kim, Yullim Lee, Soo-Yeon Cho, Hee-Tae Jung
Summary: Metal oxide semiconductors (MOS) have shown high sensitivity and selectivity for detecting H2S. However, there is a lack of methods to extend this approach to the top-down fabrication of H2S sensors. In this study, a top-down lithographic process was developed to produce a 10 nm-scale SnO2 nanochannel for H2S sensing with high-resolution and high aspect ratio structures. The nanochannel exhibited highly sensitive H2S detection performances and could be efficiently sensitized with a p-n heterojunction. Introducing a NiO nanoheterojunction further enhanced the sensor performance, demonstrating the highest sensitivity range to date for state-of-the-art H2S sensors.
Article
Chemistry, Multidisciplinary
Wei Zhang, Bin Ai, Panpan Gu, Yuduo Guan, Zengyao Wang, Zifan Xiao, Gang Zhang
Summary: Sub-10 nm nanogaps with tailored chiroptical responses were fabricated between two nanocrescents through nanoskiving, breaking mirror symmetry with subsequent deposition. Strong plasmonic coupling excited in the gaps and at the tips lead to circular dichroism activity. The chiral nanogaps can recognize specific cysteine enantiomers and show potential in various chiral applications.
Article
Multidisciplinary Sciences
Mingchao Xiao, Jie Liu, Chuan Liu, Guangchao Han, Yanjun Shi, Chunlei Li, Xi Zhang, Yuanyuan Hu, Zitong Liu, Xike Gao, Zhengxu Cai, Ji Liu, Yuanping Yi, Shuai Wang, Dong Wang, Wenping Hu, Yunqi Liu, Henning Sirringhaus, Lang Jiang
Summary: Bulk heterojunctions in organic photovoltaic devices have complex structures, but highly-ordered organic p-n junctions are desirable for studying the nature of organic heterojunctions. By using a design rationale, the authors successfully fabricated p-n heterojunctions based on monolayer molecular crystals.
NATURE COMMUNICATIONS
(2021)
Article
Chemistry, Multidisciplinary
Nilamani Behera, Avinash Kumar Chaurasiya, Victor H. Gonzalez, Artem Litvinenko, Lakhan Bainsla, Akash Kumar, Roman Khymyn, Ahmad A. Awad, Himanshu Fulara, Johan Akerman
Summary: This study identifies the current shunting issue through the Si substrate as a major problem in scaling down nano-constriction based spin Hall nano-oscillators (SHNOs). By using an ultra-thin Al2O3 seed layer and SiN-coated p-Si substrates, the researchers successfully mitigate this problem and achieve SHNOs with a width as small as 10 nm and threshold currents below 30 muA. The combination of electrical insulation and high thermal conductivity of the Al2O3 seed layer also makes it suitable for large SHNO arrays.
ADVANCED MATERIALS
(2023)
Article
Multidisciplinary Sciences
Nan Qin, Zhi-Gang Qian, Chengzhe Zhou, Xiao-Xia Xia, Tiger H. Tao
Summary: Electron beam lithography (EBL) is known for its fabrication resolution at deep nanometer scales, but its limitation in arbitrary 3D nanofabrication has been addressed by the authors through the development of voltage-regulated 3D EBL technique for manufacturing functional 3D nanostructures at sub-15 nm resolution.
NATURE COMMUNICATIONS
(2021)
Article
Chemistry, Multidisciplinary
Steven Gottlieb, Louis Pigard, Yu Kyoung Ryu, Matteo Lorenzoni, Laura Evangelio, Marta Fernandez-Regulez, Colin D. Rawlings, Martin Spieser, Francesc Perez-Murano, Marcus Mueller, Armin W. Knoll
Summary: The study presents a probe-based thermal-imaging technique that can achieve sub-10 nm lateral resolution and sub-10 ms pixel rate. Through investigating microphase-separated PS-b-PMMA block copolymers, the study reveals asymmetry in the heat flux signal and the heat flux ratio between both polymers in different geometries. Comparison with coarse-grained molecular simulations shows enhanced transport along the macromolecular backbone and Kapitza resistance at internal interfaces of the self-assembled structure.
Review
Physics, Multidisciplinary
Ruge Quhe, Lin Xu, Shiqi Liu, Chen Yang, Yangyang Wang, Hong Li, Jie Yang, Qiuhui Li, Bowen Shi, Ying Li, Yuanyuan Pan, Xiaotian Sun, Jingzhen Li, Mouyi Weng, Han Zhang, Ying Guo, Linqiang Xu, Hao Tang, Jichao Dong, Jinbo Yang, Zhiyong Zhang, Ming Lei, Feng Pan, Jing Lu
Summary: Two-dimensional semiconductors show promising electrostatics and carrier transportability, offering potential for scaling FETs' gate length down to the sub-10 nm region without compromising device performance. Many 2D FETs exhibit excellent performance for high performance and/or low power applications, extending Moore's law down to 1 to 2-nm gate length.
PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS
(2021)
Article
Materials Science, Multidisciplinary
Yahya A. Alzahrani, Masfer H. Alkahtani
Summary: This study successfully achieved the hydrothermal synthesis of small and rounded fluorescent nanodiamonds, which is of significant interest for various applications, particularly in biology. The creation of color centers, specifically nitrogen-vacancy and silicon-vacancy color centers, in the grown nanodiamonds validated the cubic diamond structure. This novel growth technique holds great promise for demanding applications in biology due to its simplicity and ability to grow high-quality diamonds.
OPTICAL MATERIALS EXPRESS
(2023)
