The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing

Published 2009 View Full Article

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Title
The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 11, Pages 2228-2231
Publisher
Elsevier BV
Online
2009-03-17
DOI
10.1016/j.mee.2009.03.078

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