Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials

Title
Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 20, Issue 14, Pages 2317-2323
Publisher
Wiley
Online
2010-06-18
DOI
10.1002/adfm.201000219

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