Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

标题
Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 2, Pages 023533
出版商
AIP Publishing
发表日期
2009-07-30
DOI
10.1063/1.3159639

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