Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

出版年份 2008 全文链接

标题

作者

关键词

出版物

Volume 112, Issue 49, Pages 19530-19539

出版商

American Chemical Society (ACS)

发表日期

2008-11-14

DOI

10.1021/jp804296a

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