Properties and Characterization of ALD Grown Dielectric Oxides for MIS Structures

标题
Properties and Characterization of ALD Grown Dielectric Oxides for MIS Structures
作者
关键词
-
出版物
ACTA PHYSICA POLONICA A
Volume 119, Issue 5, Pages 692-695
出版商
Institute of Physics, Polish Academy of Sciences
发表日期
2016-02-23
DOI
10.12693/aphyspola.119.692

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