Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

标题
Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 11, Issue 10, Pages 8818-8825
出版商
American Scientific Publishers
发表日期
2011-12-12
DOI
10.1166/jnn.2011.3471

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