Characterization of Al2O3 thin films fabricated through atomic layer deposition on polymeric substrates

标题
Characterization of Al2O3 thin films fabricated through atomic layer deposition on polymeric substrates
作者
关键词
Deposition Temperature, Breakdown Voltage, Atomic Layer Deposition, Flexible Substrate, Al2O3 Film
出版物
出版商
Springer Nature
发表日期
2014-03-05
DOI
10.1007/s10854-014-1821-6

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