Characterization of Al2O3Thin Films Fabricated at Low Temperature via Atomic Layer Deposition on PEN Substrates
出版年份 2014 全文链接
标题
Characterization of Al2O3Thin Films Fabricated at Low Temperature via Atomic Layer Deposition on PEN Substrates
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 20, Issue 4-5-6, Pages 118-124
出版商
Wiley
发表日期
2014-02-25
DOI
10.1002/cvde.201307082
参考文献
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