Atomic layer deposited aluminum oxide barrier coatings for packaging materials

标题
Atomic layer deposited aluminum oxide barrier coatings for packaging materials
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 10, Pages 2654-2658
出版商
Elsevier BV
发表日期
2009-10-13
DOI
10.1016/j.tsf.2009.08.025

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