Effect of Various Oxidants on Reaction Mechanisms, Self-Limiting Natures and Structural Characteristics of Al2 O3 Films Grown by Atomic Layer Deposition

标题
Effect of Various Oxidants on Reaction Mechanisms, Self-Limiting Natures and Structural Characteristics of Al2 O3 Films Grown by Atomic Layer Deposition
作者
关键词
-
出版物
Advanced Materials Interfaces
Volume -, Issue -, Pages 1701248
出版商
Wiley
发表日期
2018-04-26
DOI
10.1002/admi.201701248

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