Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone

标题
Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone
作者
关键词
-
出版物
LANGMUIR
Volume 28, Issue 1, Pages 350-357
出版商
American Chemical Society (ACS)
发表日期
2011-11-15
DOI
10.1021/la201136k

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