Microstructure, optical, electrical properties, and leakage current transport mechanism of sol–gel-processed high- k HfO 2 gate dielectrics

出版年份 2016 全文链接

标题

作者

关键词

High-, k, gate dielectrics, Sol–gel, Electrical properties, Leakage current transport mechanism, Optical properties

出版物

Volume 42, Issue 6, Pages 6761-6769

出版商

Elsevier BV

发表日期

2016-01-15

DOI

10.1016/j.ceramint.2016.01.050

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