Realization of Thin Film Encapsulation by Atomic Layer Deposition of Al2O3 at Low Temperature

标题
Realization of Thin Film Encapsulation by Atomic Layer Deposition of Al2O3 at Low Temperature
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 117, Issue 39, Pages 20308-20312
出版商
American Chemical Society (ACS)
发表日期
2013-08-30
DOI
10.1021/jp406738h

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