Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy

标题
Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 23, Pages 231904
出版商
AIP Publishing
发表日期
2008-06-11
DOI
10.1063/1.2940598

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