Crystalline Phase-Controlled High-Quality Hafnia Ferroelectric With RuO₂ Electrode

标题
Crystalline Phase-Controlled High-Quality Hafnia Ferroelectric With RuO₂ Electrode
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 8, Pages 3431-3434
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2020-06-20
DOI
10.1109/ted.2020.2998444

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