Improvement of Endurance in HZO-Based Ferroelectric Capacitor Using Ru Electrode

标题
Improvement of Endurance in HZO-Based Ferroelectric Capacitor Using Ru Electrode
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 40, Issue 11, Pages 1744-1747
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2019-10-02
DOI
10.1109/led.2019.2944960

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