Numerical investigation on the temperature effect in nanometric cutting of polycrystalline silicon
出版年份 2022 全文链接
标题
Numerical investigation on the temperature effect in nanometric cutting of polycrystalline silicon
作者
关键词
Molecular dynamics simulation, Nanometric cutting, Polycrystalline silicon, Subsurface damage, Material removal mechanism
出版物
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
Volume 220, Issue -, Pages 107172
出版商
Elsevier BV
发表日期
2022-03-03
DOI
10.1016/j.ijmecsci.2022.107172
参考文献
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