标题
Anisotropy of Single-Crystal Silicon in Nanometric Cutting
作者
关键词
Molecular dynamics simulation, Nanometric cutting, Single-crystal silicon, Anisotropy behavior, Subsurface damage, Chip
出版物
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
出版商
Springer Nature
发表日期
2017-04-26
DOI
10.1186/s11671-017-2046-4
参考文献
相关参考文献
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