Nanoindentation of polysilicon and single crystal silicon: Molecular dynamics simulation and experimental validation

出版年份 2014 全文链接

标题

Nanoindentation of polysilicon and single crystal silicon: Molecular dynamics simulation and experimental validation

作者

关键词

-

出版物

JOURNAL OF PHYSICS D-APPLIED PHYSICS

Volume 47, Issue 27, Pages 275304

出版商

IOP Publishing

发表日期

2014-06-13

DOI

10.1088/0022-3727/47/27/275304

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