Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon

出版年份 2020 全文链接

标题

作者

关键词

Single crystal silicon, Nanometric cutting, Subsurface damage, Phase transformation, Laser assisted

出版物

MATERIALS & DESIGN

Volume 190, Issue -, Pages 108524

出版商

Elsevier BV

发表日期

2020-01-25

DOI

10.1016/j.matdes.2020.108524

向作者/读者发起求助以获取更多资源

Protocol

在线求助

Reagent

在线求助

Reprint

联系作者

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now