A numerical study on the material removal and phase transformation in the nanometric cutting of silicon

标题
A numerical study on the material removal and phase transformation in the nanometric cutting of silicon
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 455, Issue -, Pages 608-615
出版商
Elsevier BV
发表日期
2018-05-14
DOI
10.1016/j.apsusc.2018.05.091

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