Effects of recovery and side flow on surface generation in nano-cutting of single crystal silicon

标题
Effects of recovery and side flow on surface generation in nano-cutting of single crystal silicon
作者
关键词
-
出版物
COMPUTATIONAL MATERIALS SCIENCE
Volume 143, Issue -, Pages 133-142
出版商
Elsevier BV
发表日期
2017-11-14
DOI
10.1016/j.commatsci.2017.11.002

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