Ductile mode material removal and high-pressure phase transformation in silicon during micro-laser assisted machining

出版年份 2012 全文链接

标题

Ductile mode material removal and high-pressure phase transformation in silicon during micro-laser assisted machining

作者

关键词

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出版物

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

Volume 36, Issue 2, Pages 364-367

出版商

Elsevier BV

发表日期

2012-01-11

DOI

10.1016/j.precisioneng.2011.12.003

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