Nanoindentation-induced phase transformations in silicon at elevated temperatures

标题
Nanoindentation-induced phase transformations in silicon at elevated temperatures
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 20, Issue 13, Pages 135603
出版商
IOP Publishing
发表日期
2009-03-12
DOI
10.1088/0957-4484/20/13/135603

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