Chemical solution deposition of ferroelectric yttrium-doped hafnium oxide films on platinum electrodes

标题
Chemical solution deposition of ferroelectric yttrium-doped hafnium oxide films on platinum electrodes
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 104, Issue 20, Pages 202903
出版商
AIP Publishing
发表日期
2014-05-22
DOI
10.1063/1.4879283

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