Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

标题
Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process
作者
关键词
Atomic force microscopy, Nanomilling, Nanochannels, Nanofluidic chip
出版物
Nanoscale Research Letters
Volume 14, Issue 1, Pages -
出版商
Springer Nature
发表日期
2019-04-17
DOI
10.1186/s11671-019-2962-6

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