Elastic–plastic deformation of single-crystal silicon in nano-cutting by a single-tip tool

标题
Elastic–plastic deformation of single-crystal silicon in nano-cutting by a single-tip tool
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue 8, Pages 086501
出版商
Japan Society of Applied Physics
发表日期
2019-06-21
DOI
10.7567/1347-4065/ab2b71

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