Analysis of ductile mode and brittle transition of AFM nanomachining of silicon

标题
Analysis of ductile mode and brittle transition of AFM nanomachining of silicon
作者
关键词
-
出版物
出版商
Elsevier BV
发表日期
2012-06-14
DOI
10.1016/j.ijmachtools.2012.05.011

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