Flexible and in situ fabrication of nanochannels with high aspect ratios and nanopillar arrays in fused silica substrates utilizing focused ion beam
出版年份 2015 全文链接
标题
Flexible and in situ fabrication of nanochannels with high aspect ratios and nanopillar arrays in fused silica substrates utilizing focused ion beam
作者
关键词
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出版物
RSC Advances
Volume 5, Issue 62, Pages 50638-50643
出版商
Royal Society of Chemistry (RSC)
发表日期
2015-05-25
DOI
10.1039/c5ra06306j
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