标题
Effect of creep in RF MEMS static and dynamic behavior
作者
关键词
-
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 22, Issue 5, Pages 1067-1078
出版商
Springer Nature
发表日期
2015-02-20
DOI
10.1007/s00542-015-2469-8
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Investigation of Charge Injection and Relaxation in Multilayer Dielectric Stacks for Capacitive RF MEMS Switch Application
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