Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope

标题
Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 172, Issue 2, Pages 523-532
出版商
Elsevier BV
发表日期
2011-10-02
DOI
10.1016/j.sna.2011.09.032

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