Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

标题
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 7, Pages 074021
出版商
IOP Publishing
发表日期
2009-07-01
DOI
10.1088/0960-1317/19/7/074021

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