In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

出版年份 2015 全文链接

标题

作者

关键词

出版物

Volume 24, Issue 6, Pages 1817-1826

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2015-06-17

DOI

10.1109/jmems.2015.2441142

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