Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping

Quality Factor Maximization Through Dynamic Balancing of Tuning Fork Resonator

(2014) Sergei A. Zotov et al.   IEEE SENSORS JOURNAL

A Slot-Structure MEMS Gyroscope Working at Atmosphere With Tunable Electrostatic Spring Constant

(2013) Shichang Hu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A multiple-beam tuning-fork gyroscope with high quality factors

(2011) Ren Wang et al.   SENSORS AND ACTUATORS A-PHYSICAL

Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering

(2010) Alexander A. Trusov et al.   SENSORS AND ACTUATORS A-PHYSICAL

A lateral-axis micromachined tuning fork gyroscope with torsionalZ-sensing and electrostatic force-balanced driving

(2009) Z Y Guo et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure

(2009) Lufeng Che et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability

(2008) M.F. Zaman et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A substrate energy dissipation mechanism in in-phase and anti-phase micromachinedz-axis vibratory gyroscopes

(2008) Alexander A Trusov et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING