标题
Review on the Modeling of Electrostatic MEMS
作者
关键词
-
出版物
SENSORS
Volume 10, Issue 6, Pages 6149-6171
出版商
MDPI AG
发表日期
2010-06-22
DOI
10.3390/s100606149
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Electromechanical behavior of the curled cantilever beam
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- On the Dynamic Response of Electrostatic MEMS Switches
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- Optimization of an electromagnetic comb drive actuator
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