Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer

标题
Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer
作者
关键词
-
出版物
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 15, Issue 3, Pages 035001
出版商
SPIE-Intl Soc Optical Eng
发表日期
2016-07-21
DOI
10.1117/1.jmm.15.3.035001

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