Homoepitaxial growth of β-Ga2O3 thin films by low pressure chemical vapor deposition

标题
Homoepitaxial growth of β-Ga2O3 thin films by low pressure chemical vapor deposition
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 108, Issue 18, Pages 182105
出版商
AIP Publishing
发表日期
2016-05-06
DOI
10.1063/1.4948944

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