Novel materials by atomic layer deposition and molecular layer deposition

Molecular Layer Deposition of Functional Thin Films for Advanced Lithographic Patterning

(2011) Han Zhou et al.   ACS Applied Materials & Interfaces

High-Performance Two-Dimensional Polydiacetylene with a Hybrid Inorganic-Organic Structure

(2011) Sangho Cho et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Layer-by-layer deposition of Ti–4,4′-oxydianiline hybrid thin films

(2011) Anjali Sood et al.   APPLIED SURFACE SCIENCE

Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

(2011) Maarit Kariniemi et al.   CHEMISTRY OF MATERIALS

Atomic layer deposition of organic–inorganic hybrid materials based on saturated linear carboxylic acids

(2011) Karina Barnholt Klepper et al.   DALTON TRANSACTIONS

Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films

(2011) Riikka L. Puurunen et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Atomic layer deposition of CuCl nanoparticles

(2010) G. Natarajan et al.   APPLIED PHYSICS LETTERS

Effect of crystalline structure of TiO2 substrates on initial growth of atomic layer deposited Ru thin films

(2010) Seong Keun Kim et al.   APPLIED SURFACE SCIENCE

Deposition of Ultrathin Polythiourea Films by Molecular Layer Deposition

(2010) Paul W. Loscutoff et al.   CHEMISTRY OF MATERIALS

Growth of Cu Metal Films at Room Temperature Using Catalyzed Reactions

(2010) Sang-Woo Kang et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of Antimony and its Compounds Using Dechlorosilylation Reactions of Tris(triethylsilyl)antimony

(2010) Viljami Pore et al.   CHEMISTRY OF MATERIALS

Study of bismuth alkoxides as possible precursors for ALD

(2010) Timo Hatanpää et al.   DALTON TRANSACTIONS

Deposition of thin films of organic–inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition

(2010) Karina Barnholt Klepper et al.   DALTON TRANSACTIONS

Lanthanum titanate and lithium lanthanum titanate thin films grown by atomic layer deposition

(2010) Titta Aaltonen et al.   JOURNAL OF MATERIALS CHEMISTRY

Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope

(2010) S. Yoshida et al.   Micro & Nano Letters

High performance n-type organic–inorganic nanohybrid semiconductors for flexible electronic devices

(2010) Yerok Park et al.   ORGANIC ELECTRONICS

Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers

(2009) Steven M. George et al.   ACCOUNTS OF CHEMICAL RESEARCH

Formation of Organic Nanoscale Laminates and Blends by Molecular Layer Deposition

(2009) Paul W. Loscutoff et al.   ACS Nano

New Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM

(2009) Karl Heinz Kuesters et al.   ADVANCED ENGINEERING MATERIALS

Low-Temperature Atomic Layer Deposition of Copper Metal Thin Films: Self-Limiting Surface Reaction of Copper Dimethylamino-2-propoxide with Diethylzinc

(2009) Byoung H. Lee et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Monomolecular-Step Polymer Wire Growth from Seed Core Molecules by the Carrier-Gas-Type Molecular Layer Deposition

(2009) Tetsuzo Yoshimura et al.   Applied Physics Express

Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD)

(2009) Xinhua Liang et al.   CHEMICAL COMMUNICATIONS

Atomic Layer Deposition of Ta2O5/Polyimide Nanolaminates

(2009) Leo D. Salmi et al.   CHEMICAL VAPOR DEPOSITION

Molecular Layer Deposition of Hybrid Organic−Inorganic Alucone Polymer Films Using a Three-Step ABC Reaction Sequence

(2009) Byunghoon Yoon et al.   CHEMISTRY OF MATERIALS

“Zincone” Zinc Oxide−Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition

(2009) Qing Peng et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of Iridium Thin Films by Consecutive Oxidation and Reduction Steps

(2009) Jani Hämäläinen et al.   CHEMISTRY OF MATERIALS

The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates

(2009) David C. Miller et al.   JOURNAL OF APPLIED PHYSICS

Growth and phase stabilization of HfO2 thin films by ALD using novel precursors

(2009) Jaakko Niinistö et al.   JOURNAL OF CRYSTAL GROWTH

Atomic layer deposition of lithium containing thin films

(2009) Matti Putkonen et al.   JOURNAL OF MATERIALS CHEMISTRY

Photoactivity passivation of TiO2 nanoparticles using molecular layer deposited (MLD) polymer films

(2009) Xinhua Liang et al.   JOURNAL OF NANOPARTICLE RESEARCH

Atomic Layer Deposition of Metal Tellurides and Selenides Using Alkylsilyl Compounds of Tellurium and Selenium

(2009) Viljami Pore et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Molecular Layer Deposition of Thiol−Ene Multilayers on Semiconductor Surfaces

(2009) Yun-hui Li et al.   LANGMUIR

Atomic layer deposition of Ge2Sb2Te5 thin films

(2009) Mikko Ritala et al.   MICROELECTRONIC ENGINEERING

Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition

(2009) D. Seghete et al.   SENSORS AND ACTUATORS A-PHYSICAL

Molecular layer deposition of ZrO2-based organic–inorganic nanohybrid thin films for organic thin film transistors

(2009) Byoung H. Lee et al.   THIN SOLID FILMS

Al-Doped TiO2 Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors

(2008) Seong Keun Kim et al.   ADVANCED MATERIALS

Measuring the microwave frequency relative permittivity of polyetherimide/BaTi4O9 composites by using a rectangular cavity resonator

(2008) Cheng-Fu Yang et al.   APPLIED PHYSICS LETTERS

Atomic Layer Deposition of Iridium Oxide Thin Films from Ir(acac)3and Ozone

(2008) Jani Hämäläinen et al.   CHEMISTRY OF MATERIALS

Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol

(2008) A. A. Dameron et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of MgF2Thin Films Using TaF5as a Novel Fluorine Source

(2008) Tero Pilvi et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of ZrO2 Thin Films with High Dielectric Constant on TiN Substrates

(2008) Seong Keun Kim et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Growth of High-Dielectric-Constant TiO[sub 2] Films in Capacitors with RuO[sub 2] Electrodes

(2008) K. Fröhlich et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Novel mixed alkylamido-cyclopentadienyl precursors for ALD of ZrO2 thin films

(2008) Jaakko Niinistö et al.   JOURNAL OF MATERIALS CHEMISTRY

Molecular Layer Deposition of Poly(p-phenylene terephthalamide) Films Using Terephthaloyl Chloride andp-Phenylenediamine

(2008) N. M. Adamczyk et al.   LANGMUIR

First-principles study on doping and phase stability ofHfO2

(2008) Choong-Ki Lee et al.   PHYSICAL REVIEW B