Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

标题
Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 23, Issue 11, Pages 2901-2907
出版商
American Chemical Society (ACS)
发表日期
2011-05-11
DOI
10.1021/cm200402j

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