Atomic Layer Deposition of Ta2O5/Polyimide Nanolaminates

标题
Atomic Layer Deposition of Ta2O5/Polyimide Nanolaminates
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 15, Issue 7-9, Pages 221-226
出版商
Wiley
发表日期
2009-08-24
DOI
10.1002/cvde.200906770

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