Novel mixed alkylamido-cyclopentadienyl precursors for ALD of ZrO2 thin films

标题
Novel mixed alkylamido-cyclopentadienyl precursors for ALD of ZrO2 thin films
作者
关键词
-
出版物
JOURNAL OF MATERIALS CHEMISTRY
Volume 18, Issue 43, Pages 5243
出版商
Royal Society of Chemistry (RSC)
发表日期
2008-10-29
DOI
10.1039/b810922b

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