Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers

标题
Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
作者
关键词
-
出版物
ACCOUNTS OF CHEMICAL RESEARCH
Volume 42, Issue 4, Pages 498-508
出版商
American Chemical Society (ACS)
发表日期
2009-02-27
DOI
10.1021/ar800105q

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