Atomic Layer Deposition of Antimony and its Compounds Using Dechlorosilylation Reactions of Tris(triethylsilyl)antimony

标题
Atomic Layer Deposition of Antimony and its Compounds Using Dechlorosilylation Reactions of Tris(triethylsilyl)antimony
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 23, Issue 2, Pages 247-254
出版商
American Chemical Society (ACS)
发表日期
2010-12-17
DOI
10.1021/cm102904f

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